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Charakterisierung eines ECR-Plasmas mit DC- und HF-Bias zur Untersuchung von PWW-Prozessen

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Manhard,  A.
Material Research (MF), Max Planck Institute for Plasma Physics, Max Planck Society;

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Schwarz-Selinger,  T.
Material Research (MF), Max Planck Institute for Plasma Physics, Max Planck Society;

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Manhard, A., & Schwarz-Selinger, T. (2009). Charakterisierung eines ECR-Plasmas mit DC- und HF-Bias zur Untersuchung von PWW-Prozessen. Talk presented at DPG Frühjahrstagung. Greifswald. 2009-03-30 - 2009-04-02.


Cite as: https://hdl.handle.net/21.11116/0000-0000-226D-0
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