A long-life low-noise microwave-driven ion gun for SEM charge neutralization

Titze, Benjamin

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A long-life low-noise microwave-driven ion gun for SEM charge neutralization

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Titze, Benjamin
Department of Biomedical Optics, Max Planck Institute for Medical Research, Max Planck Society;

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Titze, B. (2008). A long-life low-noise microwave-driven ion gun for SEM charge neutralization. Diploma Thesis, Ruprecht-Karls-Universität Heidelberg, Heidelberg.

Cite as: https://hdl.handle.net/11858/00-001M-0000-002E-8E3E-4

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