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Conference Paper

Conventional TEM Investigation of the FIB Damage in Copper

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Kiener, D., Jörg, T., Rester, M., Motz, C., & Dehm, G. (2007). Conventional TEM Investigation of the FIB Damage in Copper. In Proceeding 33rd Microscopy Conference, Deutsche Gesellschaft für Elektronenmikroskopie (pp. 100-101).


Cite as: https://hdl.handle.net/11858/00-001M-0000-002E-A5C5-B
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