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MEMS analogous micro-patterning of thermotropic nematic liquid crystalline elastomer films using a fluorinated photoresist and a hard mask process

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Best,  Andreas
Dept. Butt: Physics at Interfaces, MPI for Polymer Research, Max Planck Society;

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Koynov,  Kaloian
Dept. Butt: Physics at Interfaces, MPI for Polymer Research, Max Planck Society;

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Ditter, D., Chen, W. L., Best, A., Zappe, H., Koynov, K., Ober, C. K., et al. (2017). MEMS analogous micro-patterning of thermotropic nematic liquid crystalline elastomer films using a fluorinated photoresist and a hard mask process. Journal of Materials Chemistry C, 5(47), 12635-12644. doi:10.1039/c7tc03958a.


Cite as: http://hdl.handle.net/11858/00-001M-0000-002E-A14C-E
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