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Carbide formation in amorphous tungsten-containing carbon films by annealing

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Sauter,  P. A.
Material Research (MF), Max Planck Institute for Plasma Physics, Max Planck Society;

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Balden,  M.       
Material Research (MF), Max Planck Institute for Plasma Physics, Max Planck Society;

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Jong,  S.
Plasma Edge and Wall (E2M), Max Planck Institute for Plasma Physics, Max Planck Society;
Material Research (MF), Max Planck Institute for Plasma Physics, Max Planck Society;

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Adelhelm,  C.
Material Research (MF), Max Planck Institute for Plasma Physics, Max Planck Society;

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Lindig,  S.
Material Research (MF), Max Planck Institute for Plasma Physics, Max Planck Society;

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Rasinski,  M.
Material Research (MF), Max Planck Institute for Plasma Physics, Max Planck Society;

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Sauter, P. A., Balden, M., Jong, S., Adelhelm, C., Lindig, S., Rasinski, M., et al. (2010). Carbide formation in amorphous tungsten-containing carbon films by annealing. Talk presented at E-MRS 2010 Spring Meeting, Symposium L: Carbon- or nitrogene-containing nanostructured composite films. Strasbourg. 2010-06-07 - 2010-06-11.


Cite as: https://hdl.handle.net/21.11116/0000-0000-5239-4
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