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Control of layer growth by substrate bias

MPS-Authors
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Mutzke,  A.
Stellarator Theory (ST), Max Planck Institute for Plasma Physics, Max Planck Society;

/persons/resource/persons110407

Schneider,  R.
Stellarator Theory (ST), Max Planck Institute for Plasma Physics, Max Planck Society;

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Citation

Häberle, E., Kopecki, J., Mutzke, A., Schneider, R., Schulz, A., Walker, M., et al. (2010). Control of layer growth by substrate bias. Poster presented at 37th EPS Conference on Plasma Physics, Dublin.


Cite as: http://hdl.handle.net/21.11116/0000-0000-5543-5
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