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Teilchendichtecharakterisierung in einem Wasserstoff und Argon- Wasserstoff Plasma

MPS-Authors
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Sode,  M.
Plasma Edge and Wall (E2M), Max Planck Institute for Plasma Physics, Max Planck Society;
Material Research (MF), Max Planck Institute for Plasma Physics, Max Planck Society;

/persons/resource/persons110460

Schwarz-Selinger,  T.
Plasma Edge and Wall (E2M), Max Planck Institute for Plasma Physics, Max Planck Society;
Material Research (MF), Max Planck Institute for Plasma Physics, Max Planck Society;

/persons/resource/persons109489

Jacob,  W.
Plasma Edge and Wall (E2M), Max Planck Institute for Plasma Physics, Max Planck Society;
Material Research (MF), Max Planck Institute for Plasma Physics, Max Planck Society;

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Sode, M., Schwarz-Selinger, T., & Jacob, W. (2011). Teilchendichtecharakterisierung in einem Wasserstoff und Argon- Wasserstoff Plasma. Talk presented at XVIII. Erfahrungsaustausch Oberflächentechnologie mit Plasma- und Ionenstrahlprozessen. Mühlleithen. 2011-03-08 - 2011-03-10.


Cite as: https://hdl.handle.net/21.11116/0000-0000-5C0A-F
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