Modeling and sensitivity studies of cc-rf CF4 plasma

Bandelow, G.; Schneider, R.; Meichsner, J.

Item

ITEM ACTIONSEXPORT

Add to Basket

Local TagsRelease HistoryDetailsSummary

Released

Poster

Modeling and sensitivity studies of cc-rf CF₄ plasma

MPS-Authors

Bandelow, G.
Max Planck Society;

External Resource

No external resources are shared

Fulltext (restricted access)

There are currently no full texts shared for your IP range.

Fulltext (public)

There are no public fulltexts stored in PuRe

Supplementary Material (public)

There is no public supplementary material available

Citation

Bandelow, G., Schneider, R., & Meichsner, J. (2012). Modeling and sensitivity studies of cc-rf CF₄ plasma. Poster presented at 21st Europhysics Conference on the Atomic and Molecular Physics of Ionized Gases (ESCAMPIG 2012), Viana do Castelo.

Cite as: https://hdl.handle.net/21.11116/0000-0000-8A02-2

Abstract

There is no abstract available