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Quantitative Ionendichtebestimmung mit einem energieauflösenden Massenspektrometer Grenzen und Möglichkeiten

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Sode,  M.
Plasma Edge and Wall (E2M), Max Planck Institute for Plasma Physics, Max Planck Society;

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Schwarz-Selinger,  T.
Plasma Edge and Wall (E2M), Max Planck Institute for Plasma Physics, Max Planck Society;

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Jacob,  W.
Plasma Edge and Wall (E2M), Max Planck Institute for Plasma Physics, Max Planck Society;

Kersten,  H.
Max Planck Society;

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Sode, M., Schwarz-Selinger, T., Jacob, W., & Kersten, H. (2013). Quantitative Ionendichtebestimmung mit einem energieauflösenden Massenspektrometer Grenzen und Möglichkeiten. Talk presented at XX. Erfahrungsaustausch Oberflächentechnologie mit Plasma- und Ionenstrahlprozessen. Mühlleithen. 2013-03-05 - 2013-03-08.


Cite as: https://hdl.handle.net/21.11116/0000-0000-67F9-4
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