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SIESTA: a new high-current ion source for angle-dependent sputter yield measurements

MPS-Authors
/persons/resource/persons188589

Arredondo Parra,  R.
Plasma Edge and Wall (E2M), Max Planck Institute for Plasma Physics, Max Planck Society;
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Oberkofler,  M.
Plasma Edge and Wall (E2M), Max Planck Institute for Plasma Physics, Max Planck Society;

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Schwarz-Selinger,  T.
Plasma Edge and Wall (E2M), Max Planck Institute for Plasma Physics, Max Planck Society;

/persons/resource/persons110380

Schmid,  K.
Plasma Edge and Wall (E2M), Max Planck Institute for Plasma Physics, Max Planck Society;

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Citation

Arredondo Parra, R., Oberkofler, M., Schwarz-Selinger, T., & Schmid, K. (2018). SIESTA: a new high-current ion source for angle-dependent sputter yield measurements. Poster presented at 82. Jahrestagung der DPG und DPG-Frühjahrstagung der Sektion AMOP, Erlangen.


Cite as: http://hdl.handle.net/21.11116/0000-0000-C67A-8
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