Multilayer structures of silicon-suboxide embedded in single crystal silicon

Pohl, C.; Raab, N.; Mitterer, M.; Tarakina, Nadezda V.; Breuer, U.; Brunner, K.

doi:10.1016/j.jcrysgro.2013.11.073

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Multilayer structures of silicon-suboxide embedded in single crystal silicon

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Tarakina, Nadezda V.
Nadezda V. Tarakina, Kolloidchemie, Max Planck Institute of Colloids and Interfaces, Max Planck Society;

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Pohl, C., Raab, N., Mitterer, M., Tarakina, N. V., Breuer, U., & Brunner, K. (2014). Multilayer structures of silicon-suboxide embedded in single crystal silicon. Journal of Crystal Growth, 389, 12-17. doi:10.1016/j.jcrysgro.2013.11.073.

Cite as: https://hdl.handle.net/21.11116/0000-0000-F781-7

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