Excimer laser replication of ion-implanted photomasks.

Stangl, B.; Mitterauer, J.; Ruedenauer, F. G.; Marowsky, G.

doi:10.1116/1.583302

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Excimer laser replication of ion-implanted photomasks.

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Marowsky, G.
Abteilung Laserphysik, MPI for biophysical chemistry, Max Planck Society;

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Stangl, B., Mitterauer, J., Ruedenauer, F. G., & Marowsky, G. (1985). Excimer laser replication of ion-implanted photomasks. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, 3(2), 477-480. doi:10.1116/1.583302.

Cite as: https://hdl.handle.net/21.11116/0000-0001-6514-7

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