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Contamination of chip surfaces by particles during destructive physical analysis of integrated circuit devices

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Grunze,  M.
Cellular Biophysics, Max Planck Institute for Medical Research, Max Planck Society;

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Weimer, J., Kokosinski, J., Cook, M., & Grunze, M. (1988). Contamination of chip surfaces by particles during destructive physical analysis of integrated circuit devices. In K. L. Mittal (Ed.), Particles on Surfaces 1 (pp. 69-76). New York [u.a.]: Plenum Pr.


Cite as: http://hdl.handle.net/21.11116/0000-0001-8E5D-8
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