Properties and adhesion of polyimides in microeronic devices

Grunze, M.

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Properties and adhesion of polyimides in microeronic devices

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Grunze, M.
Cellular Biophysics, Max Planck Institute for Medical Research, Max Planck Society;

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Grunze, M. (1990). Properties and adhesion of polyimides in microeronic devices. In H. E. Exner, & V. Schumacher (Eds.), Advanced materials and processes: proceedings of the First European Conference on Advanced Materials and Processes EUROMAT '89 (pp. 871-880). Oberursel: DGM-Informationsgesellschaft, Verl.

Cite as: https://hdl.handle.net/21.11116/0000-0001-93EF-C

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