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Compositional analysis of InGaAs fins using Rutherford backscattering spectrometry

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Mayer,  M.
Plasma Edge and Wall (E2M), Max Planck Institute for Plasma Physics, Max Planck Society;

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Laricchiuta, G., Vandervorst, W., Vickridge, I., Mayer, M., Schulze, A., & Meersschaut, J. (2018). Compositional analysis of InGaAs fins using Rutherford backscattering spectrometry. Talk presented at 9th International Workshop on High-Resolution Depth Profiling (HRDP 2018). Uppsala. 2018-06-25 - 2018-06-29.


Cite as: https://hdl.handle.net/21.11116/0000-0001-E051-6
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