Spokes in high power impulse magnetron sputtering plasmas

Hecimovic, A.; Keudell, A. von

doi:10.1088/1361-6463/aadaa1

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Spokes in high power impulse magnetron sputtering plasmas

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Hecimovic, A.
ITER Technology & Diagnostics (ITED), Max Planck Institute for Plasma Physics, Max Planck Society;
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Hecimovic, A., & Keudell, A. v. (2018). Spokes in high power impulse magnetron sputtering plasmas. Journal of Physics D: Applied Physics, 51: 453001. doi:10.1088/1361-6463/aadaa1.

Cite as: https://hdl.handle.net/21.11116/0000-0002-1BED-6

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