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Depth resolution and preferential sputtering in depth profiling of delta layers

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Hofmann,  S.
Emeriti and Others, Max Planck Institute for Intelligent Systems, Max Planck Society;
Department of Physics, Shantou University, 243 Daxue Road Shantou, Guangdong 515063, China;

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Hofmann, S., Lian, S., Han, Y., Liu, Y., & Wang, J. (2018). Depth resolution and preferential sputtering in depth profiling of delta layers. Applied Surface Science, 455, 1045-1056. doi:10.1016/j.apsusc.2018.06.022.


Cite as: https://hdl.handle.net/21.11116/0000-0002-50F6-E
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