Velocity distribution of titanium neutrals in the target region of high power 
impulse magnetron sputtering discharges

Held, J.; Hecimovic, A.; Keudell, A. von; Schulz von der Gathen, V.

doi:10.1088/1361-6595/aae236

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Velocity distribution of titanium neutrals in the target region of high power impulse magnetron sputtering discharges

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Hecimovic, A.
ITER Technology & Diagnostics (ITED), Max Planck Institute for Plasma Physics, Max Planck Society;
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https://doi.org/10.1088/1361-6595/aae236
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Held, J., Hecimovic, A., Keudell, A. v., & Schulz von der Gathen, V. (2018). Velocity distribution of titanium neutrals in the target region of high power impulse magnetron sputtering discharges. Plasma Sources Science and Technology, 27: 105012. doi:10.1088/1361-6595/aae236.

Cite as: https://hdl.handle.net/21.11116/0000-0002-6F18-8

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