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Journal Article

Multifunctional AFM/SNOM cantilever probes: Fabrication and measurements

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Citation

Stopka, M., Drews, D., Mayr, K., Lacher, M., Ehrfeld, W., Kalkbrenner, T., et al. (2000). Multifunctional AFM/SNOM cantilever probes: Fabrication and measurements. Microelectronic Engineering, 53, 183-186. doi:10.1016/S0167-9317(00)00292-6.


Cite as: https://hdl.handle.net/21.11116/0000-0002-9BD3-1
Abstract
The microfabrication process for cantilever probes for combined atomic force (AFM) and scanning near-field optical microscopy (SNOM) is described. The probes feature an aperture tip with a Si3N4 core for SNOM operation as well as an integrated optical waveguide for illumination of the tip. First measurements have been performed using a home-made AFM/SNOM setup operating in tapping mode with optical beam deflection. A special test sample containing a pattern of gold nanostructures embedded in a transparent polymer matrix provides low topography but high optical contrast. An optical resolution of about 100 nm has been demonstrated by examining the contrast in transmitted intensity at the metal/polymer border.