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Journal Article

Lithography using nano-lens arrays made of light

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Sandoghdar, V., Drodofsky, U., Schulze, T., Brezger, B., Drewsen, M., Pfau, T., et al. (1997). Lithography using nano-lens arrays made of light. Journal of Modern Optics, 44, 1883-1898. doi:10.1080/09500349708231853.

Cite as: http://hdl.handle.net/21.11116/0000-0002-9BEE-4
We discuss the fabrication of various one and two-dimensional chromium nanostructures. A chromium atomic beam effusing out of a thermal oven is first transversally laser cooled. This well-collimated beam is then structured and focused by the optical dipole force in a periodic light field. By introducing a substrate at the focus of the atomic beam we are able to capture this pattern directly. We discuss a few applications and challenges of this young lithography technique.