A flexible method for the preparation of thin film samples for in situ TEM 
characterization combining shadow-FIB milling and electron beam-assisted etching

Liebig, J. P.; Goken, M.; Richter, Gunther; Mackovic, M.; Przybilla, T.; Spiecker, E.; Pierron, O. N.; Merle, B.

doi:10.1016/j.ultramic.2016.09.004

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A flexible method for the preparation of thin film samples for in situ TEM characterization combining shadow-FIB milling and electron beam-assisted etching

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Richter, Gunther
Central Scientific Facility Materials, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Liebig, J. P., Goken, M., Richter, G., Mackovic, M., Przybilla, T., Spiecker, E., et al. (2016). A flexible method for the preparation of thin film samples for in situ TEM characterization combining shadow-FIB milling and electron beam-assisted etching. Ultramicroscopy, 171, 82-88. doi:10.1016/j.ultramic.2016.09.004.

Cite as: https://hdl.handle.net/21.11116/0000-0002-C355-2

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