Rutherford backscattering spectrometry analysis of InGaAs nanostructures

Laricchiuta, G.; Vandervorst, W.; Vickridge, I.; Mayer, M.; Meersschaut, J.

doi:10.1116/1.5079520

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Rutherford backscattering spectrometry analysis of InGaAs nanostructures

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Mayer, M.
Plasma Edge and Wall (E2M), Max Planck Institute for Plasma Physics, Max Planck Society;

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https://doi.org/10.1116/1.5079520
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Laricchiuta, G., Vandervorst, W., Vickridge, I., Mayer, M., & Meersschaut, J. (2019). Rutherford backscattering spectrometry analysis of InGaAs nanostructures. Journal of Vacuum Science and Technology A: Vacuum, Surfaces, and Films, 37: 020601. doi:10.1116/1.5079520.

Cite as: https://hdl.handle.net/21.11116/0000-0002-EF9D-1

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