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Velocity distribution of titanium neutrals in the target region of high power impulse magnetron sputtering discharges

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Hecimovic,  A.
ITER Technology & Diagnostics (ITED), Max Planck Institute for Plasma Physics, Max Planck Society;

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Held, J., Hecimovic, A., Keudell, A. v., & Schulz von der Gathen, V. (2019). Velocity distribution of titanium neutrals in the target region of high power impulse magnetron sputtering discharges. Talk presented at DPG-Frühjahrstagung 2019 der Sektion Materie und Kosmos (SMuK). München. 2019-03-17 - 2019-03-22.


Cite as: https://hdl.handle.net/21.11116/0000-0003-23EE-A
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