3D Device Fabrication With Scanning Tunneling Hydrogen Resist Lithography

Koch, Matthias

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3D Device Fabrication With Scanning Tunneling Hydrogen Resist Lithography

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Koch, Matthias
Physical Chemistry, Fritz Haber Institute, Max Planck Society;

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Koch, M. (2018). 3D Device Fabrication With Scanning Tunneling Hydrogen Resist Lithography. Talk presented at Seminar, Department of Physical Chemistry, University of Graz. Graz, Austria. 2018-03.

Cite as: https://hdl.handle.net/21.11116/0000-0004-6E3B-0

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