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Journal Article

Deposition of thermally stable tungsten nitride thin films by reactive magnetron sputtering

MPS-Authors
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Abdelhameed,  A. H.
Plasma Edge and Wall (E2M), Max Planck Institute for Plasma Physics, Max Planck Society;

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Jacob,  W.
Plasma Edge and Wall (E2M), Max Planck Institute for Plasma Physics, Max Planck Society;

External Ressource
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Abdelhameed_Deposition.pdf
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Supplementary Material (public)
Citation

Abdelhameed, A. H., & Jacob, W. (2019). Deposition of thermally stable tungsten nitride thin films by reactive magnetron sputtering. Surface and Coatings Technology, 375, 701-707. doi:10.1016/j.surfcoat.2019.07.046.


Cite as: http://hdl.handle.net/21.11116/0000-0004-8001-9
Abstract
There is no abstract available