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Abstract

After a major modification of the target chamber at the Leipzig high energy ion nanoprobe the probe forming lens system, consisting of two separated quadrupole doublets, had been carefully realigned. This was done by adjusting the line foci position of each individual quadrupole on the centre position defined by the unfocused beam. Using a high magnification microscope the alignment process is very effective and precise. The lens system could be precisely realigned except an intrinsic rotational misalignment which is essentially reduced by a correction lens.

Grid shadow patterns have been taken and analysed in order to assess the characteristics of the system. The dominant aberrations are spherical with an additional parasitic octupole.

The grid shadow method is also very useful to determine the best position of the aperture diaphragms which minimizes the influence of the aberrations onto the beam spot size.

The rearrangement allowed larger aperture diaphragms for higher beam currents at a moderate increase in beam spot sizes. Performance tests yielded proton microbeam currents and half-widths of 4.5 nA at 1.5 μm, 8.3 nA at 1.5 μm and 17.2 nA at 2 μm. For high resolution work the expected beam spots around 0.3 μm at 100 pA were not achieved. The reason is very likely interference on the beam scanner, correlated in x- and y-direction, which results from the insufficiently rectified power supply voltage of the transconductance amplifier.