Morphological and elemental characterisation with the high-energy ion-nanoprobe 
LIPSION

Butz, T.; Meinecke, Ch.; Morawski, Markus; Reinert, Tilo; Schwertner, M.; Spemann, D.; Vogt, J.

doi:10.1016/j.apsusc.2005.01.101

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Morphological and elemental characterisation with the high-energy ion-nanoprobe LIPSION

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Butz, T., Meinecke, C., Morawski, M., Reinert, T., Schwertner, M., Spemann, D., et al. (2005). Morphological and elemental characterisation with the high-energy ion-nanoprobe LIPSION. Applied Surface Science, 252(1), 43-48. doi:10.1016/j.apsusc.2005.01.101.

Cite as: https://hdl.handle.net/21.11116/0000-0004-C6DD-4

Abstract

This contribution deals with the morphological and elemental characterisation with high--energy (MeV) focused ion beams (in particular protons) with special emphasis on high spatial resolution in the sub--micrometer regime and very low...