Novel test sample for submicron ion-beam analysis

Spemann, D.; Reinert, Tilo; Vogt, J.; Butz, T.; Otte, K.; Zimmer, K.

doi:10.1016/S0168-583X(01)00362-7

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Novel test sample for submicron ion-beam analysis

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Spemann, D., Reinert, T., Vogt, J., Butz, T., Otte, K., & Zimmer, K. (2001). Novel test sample for submicron ion-beam analysis. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 181(1-4), 186-192. doi:10.1016/S0168-583X(01)00362-7.

Cite as: https://hdl.handle.net/21.11116/0000-0004-C4FF-0

Abstract

In order to determine the beam spot size, scan size and scanning properties of a nuclear microprobe system a novel test sample with nanometer structures for the use in submicron ion--beam analysis has been developed by the University of...