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Ultraviolet/vacuum-ultraviolet emission from a high power magnetron sputtering plasma with an aluminum target

MPS-Authors
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Hecimovic,  A.
ITER Technology & Diagnostics (ITED), Max Planck Institute for Plasma Physics, Max Planck Society;
External Organizations;

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Fulltext (public)

Iglesias_UV.pdf
(Any fulltext), 980KB

Supplementary Material (public)
Citation

Iglesias, E. J., Hecimovic, A., Mitschker, F., Fiebrandt, M., Bibinov, N., & Awakowicz, P. (2020). Ultraviolet/vacuum-ultraviolet emission from a high power magnetron sputtering plasma with an aluminum target. Journal of Physics D: Applied Physics, 53: 055202. doi:10.1088/1361-6463/ab52f8.


Cite as: http://hdl.handle.net/21.11116/0000-0005-5A70-8
Abstract
There is no abstract available