Ultraviolet/vacuum-ultraviolet emission from a high power magnetron sputtering 
plasma with an aluminum target

Iglesias, E. J.; Hecimovic, A.; Mitschker, F.; Fiebrandt, M.; Bibinov, N.; Awakowicz, P.

doi:10.1088/1361-6463/ab52f8

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Ultraviolet/vacuum-ultraviolet emission from a high power magnetron sputtering plasma with an aluminum target

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Hecimovic, A.
ITER Technology & Diagnostics (ITED), Max Planck Institute for Plasma Physics, Max Planck Society;
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https://doi.org/10.1088/1361-6463/ab52f8
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Citation

Iglesias, E. J., Hecimovic, A., Mitschker, F., Fiebrandt, M., Bibinov, N., & Awakowicz, P. (2020). Ultraviolet/vacuum-ultraviolet emission from a high power magnetron sputtering plasma with an aluminum target. Journal of Physics D: Applied Physics, 53: 055202. doi:10.1088/1361-6463/ab52f8.

Cite as: https://hdl.handle.net/21.11116/0000-0005-5A70-8

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