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Abdelhameed_Deposition.pdf (Any fulltext), 402KB
Abdelhameed, A. H., Angloher, G., Bauer, P., Bento, A., Bertoldo, E., Canonica, L., et al. (2020). Deposition of Tungsten Thin Films by Magnetron Sputtering for Large-Scale Production of Tungsten-Based Transition-Edge Sensors. Journal of Low Temperature Physics, 199(1-2), 401-407. doi:10.1007/s10909-020-02357-x.