Comparison of magnetron sputtering and ion beam sputtering on dispersive mirrors

Chen, Y.; Hahner, D.; Trubetskov, Michael K.; Schrameyer, S.; Sakiew, W.; Starke, K.; Pervak, V

doi:10.1007/s00340-020-07431-6

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Comparison of magnetron sputtering and ion beam sputtering on dispersive mirrors

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Trubetskov, Michael K.
Laboratory for Attosecond Physics, Max Planck Institute of Quantum Optics, Max Planck Society;

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Chen, Y., Hahner, D., Trubetskov, M. K., Schrameyer, S., Sakiew, W., Starke, K., et al. (2020). Comparison of magnetron sputtering and ion beam sputtering on dispersive mirrors. Applied Physics B: Lasers and Optics, 126(5): 82. doi:10.1007/s00340-020-07431-6.

Cite as: https://hdl.handle.net/21.11116/0000-0006-6DE9-A

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