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Nanostructured zinc oxide films synthesized by successive chemical solution deposition for gas sensor applications

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引用

Lupan, O., Chow, L., Shishiyanu, S. T., Monaico, E., Shishiyanu, T. S., Şontea, V. P., Roldan Cuenya, B., Naitabdi, A., Park, S., & Schulte, A. F. (2009). Nanostructured zinc oxide films synthesized by successive chemical solution deposition for gas sensor applications. Materials Research Bulletin, 44(1), 63-69. doi:10.1016/j.materresbull.2008.04.006.


引用: https://hdl.handle.net/21.11116/0000-0006-D958-3
要旨
Nanostructured ZnO thin films have been deposited using a successive chemical solution deposition method. The structural, morphological, electrical and sensing properties of the films were studied for different concentrations of Al-dopant and were analyzed as a function of rapid photothermal processing temperatures. The films were investigated by X-ray diffraction, scanning electron microscopy, energy dispersive X-ray spectroscopy, X-ray photoelectron and micro-Raman spectroscopy. Electrical and gas sensitivity measurements were conducted as well. The average grain size is 240 and 224 Å for undoped ZnO and Al-doped ZnO films, respectively. We demonstrate that rapid photothermal processing is an efficient method for improving the quality of nanostructured ZnO films. Nanostructured ZnO films doped with Al showed a higher sensitivity to carbon dioxide than undoped ZnO films. The correlations between material compositions, microstructures of the films and the properties of the gas sensors are discussed.