Dissociation of the FEBID precursor cis-Pt(CO)(2)Cl-2 driven by low-energy 
electrons

da Silva, Filipe Ferreira; Thorman, Rachel M.; Bjornsson, Ragnar; Lu, Hang; McElwee-White, Lisa; Ingolfsson, Oddur

doi:10.1039/c9cp06633k

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Dissociation of the FEBID precursor cis-Pt(CO)(2)Cl-2 driven by low-energy electrons

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Bjornsson, Ragnar
Research Department DeBeer, Max Planck Institute for Chemical Energy Conversion, Max Planck Society;

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Citation

da Silva, F. F., Thorman, R. M., Bjornsson, R., Lu, H., McElwee-White, L., & Ingolfsson, O. (2020). Dissociation of the FEBID precursor cis-Pt(CO)(2)Cl-2 driven by low-energy electrons. Physical Chemistry Chemical Physics, 22(11), 6100-6108. doi:10.1039/c9cp06633k.

Cite as: https://hdl.handle.net/21.11116/0000-0007-8551-7

Abstract

In this study, we present experimental and theoretical results on dissociative electron attachment and dissociative ionisation for the potential FEBID precursor cis-Pt(CO)(2)Cl-2. UHV surface studies have shown that high purity platinum deposits can be obtained from cis-Pt(CO)(2)Cl-2. The efficiency and energetics of ligand removal through these processes are discussed and experimental appearance energies are compared to calculated thermochemical thresholds. The present results demonstrate the potential effectiveness of electron-induced reactions in the deposition of this FEBID precursor, and these are discussed in conjunction with surface science studies on this precursor and the design of new FEBID precursors.