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Journal Article

Explanation of the apparent depth resolution improvement by SIMS using cluster ion detection

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Hofmann,  Siegfried
Emeriti and Others, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Hofmann, S., Lejcek, P., Zhou, G., Yang, H., Lian, S., Kovac, J., et al. (2020). Explanation of the apparent depth resolution improvement by SIMS using cluster ion detection. Journal of Vacuum Science and Technology B, 38(3): 034010. doi:10.1116/6.0000108.


Cite as: https://hdl.handle.net/21.11116/0000-0007-9742-4
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