Height calibration of optical lever atomic force microscopes by simple laser 
interferometry

Jaschke, Manfred; Butt, Hans-Jürgen

doi:10.1063/1.1146018

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Height calibration of optical lever atomic force microscopes by simple laser interferometry

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Jaschke, Manfred
Department of Biophysical Chemistry, Max Planck Institute of Biophysics, Max Planck Society;

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Butt, Hans-Jürgen
Department of Biophysical Chemistry, Max Planck Institute of Biophysics, Max Planck Society;

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Citation

Jaschke, M., & Butt, H.-J. (1995). Height calibration of optical lever atomic force microscopes by simple laser interferometry. Review of Scientific Instruments, 66(2), 1258-1259. doi:10.1063/1.1146018.

Cite as: https://hdl.handle.net/21.11116/0000-0007-F071-A

Abstract

A new and simple interferometric method for height calibration of AFM piezo scanners is presented. Except for a small mirror no additional equipment is required since the fixed wavelength of the laser diode is used as a calibration standard. The calibration is appliable in the range between several ten nm and several μm. Besides vertical calibration many problems of piezo elements like hysteresis, nonlinearity, creep, derating, etc. and their dependence on scan parameters or temperature can be investigated.