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Artifacts in multilayer depth profiling: Origin and quantification of a double peak layer profile of Ag in ToF-SIMS depth profiles of an Ag/Ni multilayer

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Hofmann,  S.
Department of Physics, Shantou University, 243 Daxue Road, Shantou, 515063, Guangdong, China;
Emeriti and Others, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Hofmann, S., Yang, H., Kovač, J., Ekard, J., Song, Y. B., & Wang, J. Y. (2021). Artifacts in multilayer depth profiling: Origin and quantification of a double peak layer profile of Ag in ToF-SIMS depth profiles of an Ag/Ni multilayer. Materials Characterization, 171: 110774. doi:10.1016/j.matchar.2020.110774.


Cite as: https://hdl.handle.net/21.11116/0000-0008-7322-0
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