Overview of the ground state particle dynamics in pulsed sputtering discharges

Britun, N.; Michiels, M.; Hecimovic, A.; Hnilica, J.

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Overview of the ground state particle dynamics in pulsed sputtering discharges

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Hecimovic, A.
ITER Technology & Diagnostics (ITED), Max Planck Institute for Plasma Physics, Max Planck Society;
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Britun, N., Michiels, M., Hecimovic, A., & Hnilica, J. (2020). Overview of the ground state particle dynamics in pulsed sputtering discharges. Talk presented at 7th "Plasma Science & Entrepreneurship Workshop". Virtual. 2020-11-02 - 2020-11-03.

Cite as: https://hdl.handle.net/21.11116/0000-0008-E8C2-7

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