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Journal Article

Stress engineering of boron doped diamond thin films via micro-fabrication

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Best,  James P.
School of Mechanical and Manufacturing Engineering, University of New South Wales (UNSW Sydney), Sydney, NSW 2052, Australia;
Thin Films and Nanostructured Materials, Structure and Nano-/ Micromechanics of Materials, Max-Planck-Institut für Eisenforschung GmbH, Max Planck Society;
Nano-/ Micromechanics of Materials, Structure and Nano-/ Micromechanics of Materials, Max-Planck-Institut für Eisenforschung GmbH, Max Planck Society;

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5.0051196.pdf
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Citation

Isa, F., Best, J. P., Marzegalli, A., Albani, M., Compte, C., Kruzic, J. J., et al. (2021). Stress engineering of boron doped diamond thin films via micro-fabrication. APL Materials, 9: 061109. doi:10.1063/5.0051196.


Cite as: https://hdl.handle.net/21.11116/0000-0009-249A-1
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