Low-loss broadband bi-layer edge couplers for visible light

Lin, Yiding; Mak, Jason C. C.; Chen, Hong; Mu, Xin; Stalmashonak, Andrei; Jung, Youngho; Luo, Xianshu; Lo, Patrick G.-Q.; Sacher, Wesley D.; Poon, Joyce K. S.

doi:10.1364/OE.435669

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Low-loss broadband bi-layer edge couplers for visible light

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/persons/resource/persons258070

Lin, Yiding
Nanophotonics, Integration, and Neural Technology, Max Planck Institute of Microstructure Physics, Max Planck Society;

/persons/resource/persons260634

Chen, Hong
Nanophotonics, Integration, and Neural Technology, Max Planck Institute of Microstructure Physics, Max Planck Society;

/persons/resource/persons265928

Mu, Xin
Nanophotonics, Integration, and Neural Technology, Max Planck Institute of Microstructure Physics, Max Planck Society;

/persons/resource/persons265926

Stalmashonak, Andrei
Nanophotonics, Integration, and Neural Technology, Max Planck Institute of Microstructure Physics, Max Planck Society;

/persons/resource/persons258007

Jung, Youngho
Nanophotonics, Integration, and Neural Technology, Max Planck Institute of Microstructure Physics, Max Planck Society;

/persons/resource/persons258003

Sacher, Wesley D.
Nanophotonics, Integration, and Neural Technology, Max Planck Institute of Microstructure Physics, Max Planck Society;

/persons/resource/persons257612

Poon, Joyce K. S.
Nanophotonics, Integration, and Neural Technology, Max Planck Institute of Microstructure Physics, Max Planck Society;

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Citation

Lin, Y., Mak, J. C. C., Chen, H., Mu, X., Stalmashonak, A., Jung, Y., et al. (2021). Low-loss broadband bi-layer edge couplers for visible light. Optics Express, 29(21), 34565-34576. doi:10.1364/OE.435669.

Cite as: https://hdl.handle.net/21.11116/0000-0009-5791-1

Abstract

Low-loss broadband fiber-to-chip coupling is currently challenging for visible-light photonic-integrated circuits (PICs) that need both high confinement waveguides for high-density integration and a minimum feature size above foundry lithographical limit. Here, we demonstrate bi-layer silicon nitride (SiN) edge couplers that have ≤ 4 dB/facet coupling loss with the Nufern S405-XP fiber over a broad optical wavelength range from 445 to 640 nm. The design uses a thin layer of SiN to expand the mode at the facet and adiabatically transfers the input light into a high-confinement single-mode waveguide (150-nm thick) for routing, while keeping the minimum nominal lithographic feature size at 150 nm. The achieved fiber-to-chip coupling loss is about 3 to 5 dB lower than that of single-layer designs with the same waveguide confinement and minimum feature size limitation.