Graphical user interface for SDTrimSP to simulate sputtering, ion implantation 
and the dynamic effects of ion irradiation

Szabo, P. S.; Weichselbaum, D.; Biber, H.; Cupak, C.; Mutzke, A.; Wilhelm, R. A.; Aumayr, F.

doi:10.1016/j.nimb.2022.04.008

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Graphical user interface for SDTrimSP to simulate sputtering, ion implantation and the dynamic effects of ion irradiation

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Mutzke, A.
Stellarator Theory (ST), Max Planck Institute for Plasma Physics, Max Planck Society;

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https://doi.org/10.1016/j.nimb.2022.04.008
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Szabo, P. S., Weichselbaum, D., Biber, H., Cupak, C., Mutzke, A., Wilhelm, R. A., et al. (2022). Graphical user interface for SDTrimSP to simulate sputtering, ion implantation and the dynamic effects of ion irradiation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 522, 47-53. doi:10.1016/j.nimb.2022.04.008.

Cite as: https://hdl.handle.net/21.11116/0000-000A-9800-A

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