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Development of ion beam sputtering for multilayer dispersive mirrors

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Chen,  Yu
Laboratory for Attosecond Physics, Max Planck Institute of Quantum Optics, Max Planck Society;

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Chen_Yu.pdf
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Citation

Chen, Y. (2021). Development of ion beam sputtering for multilayer dispersive mirrors. PhD Thesis, Ludwig Maximilians Universität, München.


Cite as: https://hdl.handle.net/21.11116/0000-000A-A14C-B
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