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Conference Paper

Implantable neural probe system for patterned photostimulation and electrophysiology recording

MPS-Authors
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Chen,  Fu-Der
Nanophotonics, Integration, and Neural Technology, Max Planck Institute of Microstructure Physics, Max Planck Society;

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Wahn,  Hannes
Nanophotonics, Integration, and Neural Technology, Max Planck Institute of Microstructure Physics, Max Planck Society;

/persons/resource/persons277233

Xue,  Tianyuan
Nanophotonics, Integration, and Neural Technology, Max Planck Institute of Microstructure Physics, Max Planck Society;

/persons/resource/persons258007

Jung,  Youngho
Nanophotonics, Integration, and Neural Technology, Max Planck Institute of Microstructure Physics, Max Planck Society;

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Straguzzi,  John N.
Nanophotonics, Integration, and Neural Technology, Max Planck Institute of Microstructure Physics, Max Planck Society;

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Azadeh,  Saeed S.
Nanophotonics, Integration, and Neural Technology, Max Planck Institute of Microstructure Physics, Max Planck Society;

/persons/resource/persons265926

Stalmashonak,  Andrei
Nanophotonics, Integration, and Neural Technology, Max Planck Institute of Microstructure Physics, Max Planck Society;

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Sacher,  Wesley D.
Nanophotonics, Integration, and Neural Technology, Max Planck Institute of Microstructure Physics, Max Planck Society;

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Poon,  Joyce K. S.       
Nanophotonics, Integration, and Neural Technology, Max Planck Institute of Microstructure Physics, Max Planck Society;

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Citation

Chen, F.-D., Wahn, H., Xue, T., Jung, Y., Straguzzi, J. N., Azadeh, S. S., et al. (2022). Implantable neural probe system for patterned photostimulation and electrophysiology recording. In CLEO: Science and Innovations 2022. Optica Publishing Group.


Cite as: https://hdl.handle.net/21.11116/0000-000A-E239-7
Abstract
We demonstrate a system for implantable nanophotonic neural probes with custom packaging and peripherals. The probes, which were manufactured on 200mm Si wafers, monolithically integrate SiN waveguides with TiN electrophysiology electrodes and were tested in vivo.