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Conference Paper

1D beam steering by a waveguide-integrated MEMS cantilever in the visible spectrum

MPS-Authors
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Azadeh,  Saeed S.
Nanophotonics, Integration, and Neural Technology, Max Planck Institute of Microstructure Physics, Max Planck Society;

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Chen,  Hong
Nanophotonics, Integration, and Neural Technology, Max Planck Institute of Microstructure Physics, Max Planck Society;

/persons/resource/persons260636

Chen,  Fu-Der
Nanophotonics, Integration, and Neural Technology, Max Planck Institute of Microstructure Physics, Max Planck Society;
Max Planck - University of Toronto Centre for Neural Science and Technology, Max Planck Institute of Microstructure Physics, Max Planck Society;

/persons/resource/persons258003

Sacher,  Wesley D.
Nanophotonics, Integration, and Neural Technology, Max Planck Institute of Microstructure Physics, Max Planck Society;

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Poon,  Joyce K. S.       
Nanophotonics, Integration, and Neural Technology, Max Planck Institute of Microstructure Physics, Max Planck Society;

External Resource

https://doi.org/10.1364/CLEO_AT.2022.AM2C.4
(Publisher version)

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Citation

Azadeh, S. S., Mak, J. C. C., Chen, H., Luo, X., Chen, F.-D., Chua, H., et al. (2022). 1D beam steering by a waveguide-integrated MEMS cantilever in the visible spectrum. In CLEO: Science and Innovations 2022. Optica Publishing Group. doi:10.1364/CLEO_AT.2022.AM2C.4.


Cite as: https://hdl.handle.net/21.11116/0000-000A-E246-8
Abstract
We demonstrate one-dimensional beam steering in the visible spectrum using an electro-thermally actuated waveguide-integrated MEMS cantilever. A 24° scan range, 29 mW power consumption, and resonant scan rate of 4.74kHz were achieved at a fixed wavelength.