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Single rolled-up SiGe/Si microtubes: Structure and thermal stability

MPS-Authors
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Songmuang,  R.
Former Scientific Facilities, Max Planck Institute for Solid State Research, Max Planck Society;

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Jin-Phillipp,  N. Y.
Department Physical Chemistry of Solids (Joachim Maier), Max Planck Institute for Solid State Research, Max Planck Society;

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Mendach,  S.
Former Scientific Facilities, Max Planck Institute for Solid State Research, Max Planck Society;

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Schmidt,  O. G.
Former Scientific Facilities, Max Planck Institute for Solid State Research, Max Planck Society;
Scientific Facility Nanostructuring Lab (Jürgen Weis), Max Planck Institute for Solid State Research, Max Planck Society;
Abteilung v. Klitzing, Former Departments, Max Planck Institute for Solid State Research, Max Planck Society;
Department Nanoscale Science (Klaus Kern), Max Planck Institute for Solid State Research, Max Planck Society;

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Citation

Songmuang, R., Jin-Phillipp, N. Y., Mendach, S., & Schmidt, O. G. (2006). Single rolled-up SiGe/Si microtubes: Structure and thermal stability. Applied Physics Letters, 88(2): 021913.


Cite as: https://hdl.handle.net/21.11116/0000-000F-0297-4
Abstract
We investigate the structure and thermal stability of freestanding
SiGe/Si rolled-up microtubes by secondary ion mass spectroscopy,
scanning and transmission electron microscopy, as well as micro-Raman
spectroscopy. The tube walls show good crystal quality but become
thinner during tube fabrication, leading to smaller diameters than
expected. Si-Si vibration modes from the wall are consistent with Raman
shifts induced by the strain distribution in the structure.
Furthermore, the Raman shifts are used to monitor the tube temperature
during laser annealing. At high temperatures, the tube structure
irreversibly changes due to Si and Ge interdiffusion and, most
remarkably, by Ge condensation. (c) 2006 American Institute of Physics.