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Journal Article

CVD synthesis of single wall carbon nanotubes devoted to ULSI electronic applications

MPS-Authors
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Ansaldo,  A.
Abteilung v. Klitzing, Former Departments, Max Planck Institute for Solid State Research, Max Planck Society;

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Haluska,  M.
Abteilung v. Klitzing, Former Departments, Max Planck Institute for Solid State Research, Max Planck Society;

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Roth,  S.
Abteilung v. Klitzing, Former Departments, Max Planck Institute for Solid State Research, Max Planck Society;

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Citation

Ansaldo, A., Haluska, M., Cech, J., Ricci, D., Gatti, F., Di Zitti, E., et al. (2006). CVD synthesis of single wall carbon nanotubes devoted to ULSI electronic applications. physica status solidi (b), 243(13), 3077-3081.


Cite as: https://hdl.handle.net/21.11116/0000-000E-FEC0-B
Abstract
We report a comparison of the behaviour of different catalysts for the
ethanol-CVD growth of single-wall carbon nanotubes (SWCNTs) on
thermally grown silicon dioxide on silicon substrate. The samples have
been prepared by spin-coating organometallic salt (Co, Fe, Mo, Ni
acetate, and their bimetallic mixtures) water solutions (ethanol
solution for Mo). As grown samples have been characterized by Raman
spectroscopy, Atomic Force Microscopy and Scanning Electron Microscopy.
Assuming as target the growth of high quality isolated nanotubes, the
ratio in Raman spectra between the intensity of the G peak and of the D
peak, has been used as main parameter to evaluate the performance of
the catalytic process.