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Process integration of microtubes for fluidic applications

MPS-Authors
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Thurmer,  D. J.
Former Scientific Facilities, Max Planck Institute for Solid State Research, Max Planck Society;

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Deneke,  Ch.
Former Scientific Facilities, Max Planck Institute for Solid State Research, Max Planck Society;
Abteilung v. Klitzing, Former Departments, Max Planck Institute for Solid State Research, Max Planck Society;

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Mei,  Y.
Former Scientific Facilities, Max Planck Institute for Solid State Research, Max Planck Society;

/persons/resource/persons280485

Schmidt,  O. G.
Former Scientific Facilities, Max Planck Institute for Solid State Research, Max Planck Society;
Scientific Facility Nanostructuring Lab (Jürgen Weis), Max Planck Institute for Solid State Research, Max Planck Society;
Abteilung v. Klitzing, Former Departments, Max Planck Institute for Solid State Research, Max Planck Society;
Department Nanoscale Science (Klaus Kern), Max Planck Institute for Solid State Research, Max Planck Society;

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Citation

Thurmer, D. J., Deneke, C., Mei, Y., & Schmidt, O. G. (2006). Process integration of microtubes for fluidic applications. Applied Physics Letters, 89(22): 223507.


Cite as: https://hdl.handle.net/21.11116/0000-000E-FB5B-2
Abstract
Three-dimensional InGaAs/GaAs microtubes are integrated by
photolithography into a microfluidic device. The integration process,
made possible due to advances in fabricating long, homogeneous
rolled-up microtubes, is described in detail. Liquid filling and
emptying of individual microtubes, and the final microfluidic device
are investigated by video microscopy. The authors find an agreement for
their channels with the Washburn equation [Phys. Rev. 17, 273 (1921)]
for filling using a modified capillary pressure fit to experimental
conditions. Emptying of a vacuum pumped microfluidic device also
qualitatively agrees with theory. The results suggest rolled-up micro-
and nanotubes as possible systems to provide fully integrative fluid
analysis on a chip. (c) 2006 American Institute of Physics.