Wide-range vibratory vacuum gauge

Thurmer, D. J.; Price, J. C.

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Wide-range vibratory vacuum gauge

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Thurmer, D. J.
Former Scientific Facilities, Max Planck Institute for Solid State Research, Max Planck Society;

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Thurmer, D. J., & Price, J. C. (2006). Wide-range vibratory vacuum gauge. Journal of Vacuum Science & Technology B, 24(5), 1702-1705.

Cite as: https://hdl.handle.net/21.11116/0000-000F-008D-2

Abstract

We describe a vibratory vacuum gauge in which a small force due to
high-frequency compression of a gas excites a planar mechanical
oscillator. Compared to vibratory viscosity gauges, this principle
allows operation at lower pressures. With a prototype apparatus we
demonstrate sensitivity from 10(5) to 10(-4) Pa for argon, nitrogen,
and helium. A simple theory for the device is presented which gives an
account of the pressure and molecular weight dependence of the response
in the molecular flow regime. (c) 2006 American Vacuum Society.