Concentration of N and P in SIC investigated by time-of-flight secondary ion 
mass spectrometry (TOF-SIMS)

Acartürk, T.; Semmelroth, K.; Pensl, G.; Saddow, S. E.; Starke, U.

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Concentration of N and P in SIC investigated by time-of-flight secondary ion mass spectrometry (TOF-SIMS)

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Acartürk, T.
Scientific Facility Interface Analysis (Ulrich Starke), Max Planck Institute for Solid State Research, Max Planck Society;

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Starke, U.
Scientific Facility Interface Analysis (Ulrich Starke), Max Planck Institute for Solid State Research, Max Planck Society;

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Acartürk, T., Semmelroth, K., Pensl, G., Saddow, S. E., & Starke, U. (2005). Concentration of N and P in SIC investigated by time-of-flight secondary ion mass spectrometry (TOF-SIMS). Materials Science Forum, 483-485, 453-456.

Cite as: https://hdl.handle.net/21.11116/0000-000E-FD0C-9

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