Plasma-Enhanced CVD Synthesis and Structural Characterization of Ta2N3

Ganin, A. Y.; Kienle, L.; Vajenine, G. V.

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Plasma-Enhanced CVD Synthesis and Structural Characterization of Ta₂N₃

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Ganin, A. Y.
Former Departments, Max Planck Institute for Solid State Research, Max Planck Society;

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Kienle, L.
Department Nanochemistry (Bettina V. Lotsch), Max Planck Institute for Solid State Research, Max Planck Society;
Former Departments, Max Planck Institute for Solid State Research, Max Planck Society;

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Vajenine, G. V.
Former Departments, Max Planck Institute for Solid State Research, Max Planck Society;

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Ganin, A. Y., Kienle, L., & Vajenine, G. V. (2004). Plasma-Enhanced CVD Synthesis and Structural Characterization of Ta₂N₃. European Journal of Inorganic Chemistry, 2004, 3233-3239.

Cite as: https://hdl.handle.net/21.11116/0000-000E-F723-4

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