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Journal Article

Self-assembling nanostructures and atomic layer precise etching in molecular beam epitaxy

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Eberl,  K.
Former Scientific Facilities, Max Planck Institute for Solid State Research, Max Planck Society;

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Zundel,  M. K.
Former Scientific Facilities, Max Planck Institute for Solid State Research, Max Planck Society;

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Eberl, K., Zundel, M. K., & Schuler, H. (2000). Self-assembling nanostructures and atomic layer precise etching in molecular beam epitaxy. Solid State Ionics, 131, 61-68.


Cite as: https://hdl.handle.net/21.11116/0000-000E-E713-8
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